Interferometer-controlled 6D-Motion System for Spectrometer Calibration
SmarAct’s motion and interferometry system enables µm-accurate spectrometer calibration for ESA’s atmospheric satellite mission.
Semi-Blind Nanoprobing
Discover how SmarAct's semi-blind nanoprobing reduces beam-induced degradation, ensuring reliable measurements in sensitive samples.
Probes for Low-eV Nanoprobing
Discover custom tungsten probes designed for low-voltage SEM applications, ensuring precise imaging and contact in advanced devices.
Automated Cross-Cleaning of Probes
Learn how SmarAct's system improves probe performance with automated cross-cleaning for consistent and reliable results.
Automated Fiber Array Assembly Enabled by SmarAct’s Precision Systems
Discover how SmarAct's precision technology enhances fiber array assembly for optimal performance in photonic systems.
Precise Depth Control for Nanoscale Scratching with METIRIO A1
Nanometer-precise depth control in nanoscratching—enabled by the METIRIO A1 encoder for uniform, high-resolution structures across stainless steel, aluminum, and copper.
Production-ready manufacturing of precision optical assemblies
Fully automated alignment and assembly with micrometer-level accuracy using the P50 microassembly platform.
Alignment and Microassembly of Optical Components
Discover SmarAct's advanced systems for precise alignment and microassembly of optical components in high-tech applications.
X-ray Dark-Field Imaging Enhanced By Tunable Interferometry Technique
Discover how tunable interferometry enhances X-ray imaging for precise material analysis beyond conventional limits.
4D Scanning Transmission Electron Microscopy
Discover 4D-STEM's techniques for characterizing materials with high precision and adaptability for diverse applications.
OEM Laser Components
Discover our laser components designed for semiconductor and photonics industries, offering precision and reliability.
Fiber Alignment for Photonic Integrated Circuits
Ultra-fast, high-precision alignment of fibers to PICs right at the wafer-level.
Wafer Positioning
Discover high-precision wafer positioning for semiconductor manufacturing to enhance device performance and quality.
Wafer Alignment
Discover high-precision wafer alignment systems for semiconductor manufacturing, featuring advanced motion and metrology technologies.
EUV Lithography
Explore advanced positioning systems for EUV lithography. Achieve precision in harsh environments with SmarAct technology.
Lithography Mask Correction
Explore precision lithography mask correction with SmarAct's systems, ensuring nm-level accuracy for flawless integrated circuits.
Optical Assembly
Explore advanced optical assemblies with precision gripping and positioning systems for photonics applications.
Quantum Computing with Cryo Stages
Discover high-precision cryogenic positioning systems for quantum applications, ensuring optimal performance under extreme conditions.
Optical Characterization
Discover high-precision positioning and metrology solutions for testing micro displays and sensors at SmarAct.
FlyScan-Analysis
Discover the FlyScan-Analysis systems for quick data collection and precise sample analysis with synchronized position tracking.
Electrical Probing
Discover automated electrical probing solutions for semiconductors, including advanced technologies for precise measurements.
Vibrometry for MEMS
Discover how SmarAct's PicoScale Vibrometer measures MEMS vibrations through silicon packaging using IR confocal imaging technology.
The Cellular Force Microscope
Based on SmarActs SLC-17 series linear positioners on an inverted microscope.
Ultrasound-Based Brain Scanning
Lightweight probe positioning system for primate brain research
Attosecond and Ultrafast Optics at ICFO
Prof. Dr. Biegert
Smarpod for State-Of-The-Art Pick-And-Place Activities
Institute of Photonics (IOP), University of Strathclyde UK
Measuring Mems Vibrations Through a Packaging of Silicon
Collaboration with TDK Insense.
Measuring Lateral Vibrations Within All-Silicon Loudspeakers
Collaboration with the Fraunhofer Institute for Photonic Microsystems.
Imaging Vibrations inside Acoustofluidic Devices
Collaboration with ETH Zurich.
Single Point Vibration Measurement
Discover high precision single point vibration measurement using the PICOSCALE Interferometer for advanced analyses.
Measurement of Radial Run-Out and Wobble
Discover how the PICOSCALE Interferometer measures radial run-out with picometer precision for industrial applications.
Customized Rotation Stage for Sophisticated Soft X-Ray Laminography
For Swiss Light Source, Paul Scherrer Institut
High-Precision Positioning Technology for High-Performance Quantum Networks
For Max Planck Institute of Quantum Optics
High Precision Microscope Stage for Two Photon Polymerization
For UpNano GmbH Vienna, Austria
Automated Sample Delivery in Serial Femtosecond Crystallography (SFX)
For Center for Free-Electron Laser Science (CFEL), University of Hamburg, Germany
Modal Analysis of Acoustofluidic Devices
For ETH Zurich, Switzerland
The Watt Balance: An Experimet to Realize the New Definition of the Kilogram
For METAS, Federal Institute of Metrology, Berne, Switzerland
Motion System for Compact von Hamos X-Ray Spectrometer
For National Metrology Institute (PTB), BESSY II Photon Source, Berlin, Germany
6D System for the µRobotex Platform
For the Femto-ST Research Laboratory, Besançon, France
7D System for X-Ray Imaging
At the NANOSCOPIUM Beamline, Synchrotron Soleil, Gif-sur-Yvette, France
Precise Control of Rotating Objects in Beamlines
For National Synchrotron Radiation Research Center (NSRRC), Hsinchu, Taiwan
Ophthalmologic Drug Delivery Platform
For the Ophthalmology department of Klinikum rechts der Isar, Technical University of Munich, Germany
Improved Condenser Alignment in Fourier-Transform Infrared Spectroscopy and Microscopy
At the MIRAS Beamline, ALBA Synchrotron, Barcelona, Spain
Plasma Acceleration Experiments with SMARPODs
At the REGAE Beamline, DESY, Hamburg, Germany
High Precision Lens Alignment for Macromolecular Crystallography
At the X10SA Beamline, Swiss Light Source (SLS) at the Paul Scherrer Institut (PSI), Switzerland
Highly Compact XYR-Stage for an automated Laser Ablation System
For 3D-MICROMAC AG, Chemnitz, Germany
Multi-Axis Positioning and Probing System for a Synchrotron Endstation
At the FORMOSA Beamline, Taiwan Photon Source (TPS@NSRRC), Hsinchu, Taiwan
Cryo Compatible Positioners to Align the Optics Combining the Images of the Individual Telescopes
For European Southern Observetory (ESO), Mt. Cerro Paranal, Chile
3D Printer Stage for Fundamental Research in Additive Manufacturing
At the CHX Beamline, National Synchrotron Light Source II (NSLS-II), Brookhaven National Laboratory, Uton, New York, USA
The Art of SEM Imaging
for Stefan Diller, Scientific Photograph, Würzburg, Germany
Automated FAC Alignment Station
Automated alignment of FAC lenses for laser diode bars implemented on a custom SmarAct positioning as a desktop solution.