Interferometer-controlled 6D-Motion System for Spectrometer Calibration

SmarAct’s motion and interferometry system enables µm-accurate spectrometer calibration for ESA’s atmospheric satellite mission.

Semi-Blind Nanoprobing

Discover how SmarAct's semi-blind nanoprobing reduces beam-induced degradation, ensuring reliable measurements in sensitive samples.

Probes for Low-eV Nanoprobing

Discover custom tungsten probes designed for low-voltage SEM applications, ensuring precise imaging and contact in advanced devices.

Automated Cross-Cleaning of Probes

Learn how SmarAct's system improves probe performance with automated cross-cleaning for consistent and reliable results.

Automated Fiber Array Assembly Enabled by SmarAct’s Precision Systems

Discover how SmarAct's precision technology enhances fiber array assembly for optimal performance in photonic systems.

Precise Depth Control for Nanoscale Scratching with METIRIO A1

Nanometer-precise depth control in nanoscratching—enabled by the METIRIO A1 encoder for uniform, high-resolution structures across stainless steel, aluminum, and copper.

Production-ready manufacturing of precision optical assemblies

Fully automated alignment and assembly with micrometer-level accuracy using the P50 microassembly platform.

Alignment and Microassembly of Optical Components

Discover SmarAct's advanced systems for precise alignment and microassembly of optical components in high-tech applications.

X-ray Dark-Field Imaging Enhanced By Tunable Interferometry Technique

Discover how tunable interferometry enhances X-ray imaging for precise material analysis beyond conventional limits.

4D Scanning Transmission Electron Microscopy

Discover 4D-STEM's techniques for characterizing materials with high precision and adaptability for diverse applications.

OEM Laser Components

Discover our laser components designed for semiconductor and photonics industries, offering precision and reliability.

Fiber Alignment for Photonic Integrated Circuits

Ultra-fast, high-precision alignment of fibers to PICs right at the wafer-level.

Wafer Positioning

Discover high-precision wafer positioning for semiconductor manufacturing to enhance device performance and quality.

Wafer Alignment

Discover high-precision wafer alignment systems for semiconductor manufacturing, featuring advanced motion and metrology technologies.

EUV Lithography

Explore advanced positioning systems for EUV lithography. Achieve precision in harsh environments with SmarAct technology.

Lithography Mask Correction

Explore precision lithography mask correction with SmarAct's systems, ensuring nm-level accuracy for flawless integrated circuits.

Optical Assembly

Explore advanced optical assemblies with precision gripping and positioning systems for photonics applications.

Quantum Computing with Cryo Stages

Discover high-precision cryogenic positioning systems for quantum applications, ensuring optimal performance under extreme conditions.

Optical Characterization

Discover high-precision positioning and metrology solutions for testing micro displays and sensors at SmarAct.

FlyScan-Analysis

Discover the FlyScan-Analysis systems for quick data collection and precise sample analysis with synchronized position tracking.

Electrical Probing

Discover automated electrical probing solutions for semiconductors, including advanced technologies for precise measurements.

Vibrometry for MEMS

Discover how SmarAct's PicoScale Vibrometer measures MEMS vibrations through silicon packaging using IR confocal imaging technology.
CFM Setup based on SmarActs SLC17 series linear positioners on an inverted microscope

The Cellular Force Microscope

Based on SmarActs SLC-17 series linear positioners on an inverted microscope.
Functional ultrasound image of a rhesus monkey’s brain using a 6 MHz probe (adapted from [1])

Ultrasound-Based Brain Scanning

Lightweight probe positioning system for primate brain research

Smarpod for State-Of-The-Art Pick-And-Place Activities

Institute of Photonics (IOP), University of Strathclyde UK

Measuring Lateral Vibrations Within All-Silicon Loudspeakers

Collaboration with the Fraunhofer Institute for Photonic Microsystems.

Single Point Vibration Measurement

Discover high precision single point vibration measurement using the PICOSCALE Interferometer for advanced analyses.

Measurement of Radial Run-Out and Wobble

Discover how the PICOSCALE Interferometer measures radial run-out with picometer precision for industrial applications.
© Katharina Witte, PSI, PolLux Beamline

Customized Rotation Stage for Sophisticated Soft X-Ray Laminography

For Swiss Light Source, Paul Scherrer Institut

Automated Sample Delivery in Serial Femtosecond Crystallography (SFX)

For Center for Free-Electron Laser Science (CFEL), University of Hamburg, Germany

Modal Analysis of Acoustofluidic Devices

For ETH Zurich, Switzerland

The Watt Balance: An Experimet to Realize the New Definition of the Kilogram

For METAS, Federal Institute of Metrology, Berne, Switzerland

Motion System for Compact von Hamos X-Ray Spectrometer

For National Metrology Institute (PTB), BESSY II Photon Source, Berlin, Germany

6D System for the µRobotex Platform

For the Femto-ST Research Laboratory, Besançon, France

7D System for X-Ray Imaging

At the NANOSCOPIUM Beamline, Synchrotron Soleil, Gif-sur-Yvette, France
© Huang-Yeh Chen, NSRRC

Precise Control of Rotating Objects in Beamlines

For National Synchrotron Radiation Research Center (NSRRC), Hsinchu, Taiwan

Ophthalmologic Drug Delivery Platform

For the Ophthalmology department of Klinikum rechts der Isar, Technical University of Munich, Germany

Improved Condenser Alignment in Fourier-Transform Infrared Spectroscopy and Microscopy

At the MIRAS Beamline, ALBA Synchrotron, Barcelona, Spain

Plasma Acceleration Experiments with SMARPODs

At the REGAE Beamline, DESY, Hamburg, Germany

High Precision Lens Alignment for Macromolecular Crystallography

At the X10SA Beamline, Swiss Light Source (SLS) at the Paul Scherrer Institut (PSI), Switzerland

Automated FAC Alignment Station

Automated alignment of FAC lenses for laser diode bars implemented on a custom SmarAct positioning as a desktop solution.