技术参数
下载规格表
| 下载规格表 | 机械参数 |
|---|---|
| 机械参数 | |
| 扫描范围 [µm] | > 1.3 |
| 行程 [mm] | 83 |
| 阻挡力 [N] | ≥ 3.5 |
| 最大法向力 [N] | 30 |
| 最大提升力 [N] | 1.5 |
| 尺寸 [mm] | 120 x 24 x 10.5 |
| 重量 [g] | 144 |
| 开环 | |
| 开环 | |
| Velocity [mm/s] | > 20 |
| Open-Loop Resolution MCS2 [nm] | < 1 |
| Open-Loop Resolution (H)CU [nm] | < 50 |
| 闭环 | |
| 闭环 | |
| 传感器分辨率 MCS2 [nm] | 1 (S), 4 (L) |
| 传感器分辨率 (H)CU [nm] | 100 (L) |
| Uni-Directional Repeatability MCS2 [nm] | ± 40 (S,L) |
| 单向重复精度 (H)CU [nm] | ± 200 (L) |
| 选项 | |
| 选项 | |
| 材料选项 | Aluminum base as standard; Steel base (-ST); Titanium base (-TI); Black anodized (-BK) |
| 机械选项 | U-shaped base for higher mechanical strength (-W): width is 6 mm larger; cage-creep-free guideways (-Z) |
| 性能选项 | Higher blocking force (-D): +1.5 N |
| 低温选项 | -- |
| 真空选项 | HV (1E-6 mbar); UHV (1E-11 mbar) |
| 非磁性选项 | Yes. Changes of the slide hole pattern apply: all threaded holes |
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