XY-CLS32:32
Spezifikationen
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PDF-Download | Mechanical |
---|---|
Mechanical | |
Degrees of Freedom | 2 |
Stages used | CLS-3232 |
Travel [mm] | 21 (X); 21 (Y); |
Payload [N] | 20 |
Closed-Loop | |
Closed-Loop | |
Sensor Resolution MCS2 [nm] | 1 (S) |
Breadboard Mount | |
Breadboard Mount | |
Dimensions [mm] | 65 x 65 x 27 (L x W x H) |
Height of Platform above Ground [mm] | 27 |
Direct Mount | |
Direct Mount | |
Dimensions [mm] | 32 x 32 x 22 (L x W x H) |
Height of Platform above Ground [mm] | 22 |
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