XY-SLC17:22
Spezifikationen
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PDF-Download | Mechanical |
---|---|
Mechanical | |
Degrees of Freedom | 2 |
Stages used | SLC-1720 |
Travel [mm] | 12 (X); 12 (Y) |
Payload [N] | 20 |
Closed-Loop | |
Closed-Loop | |
Sensor Resolution MCS2 [nm] | 1 (S) |
Breadboard Mount | |
Breadboard Mount | |
Dimensions [mm] | 65 x 65 x 24 (L x W x H) |
Height of Platform above Ground [mm] | 24 |
Direct Mount | |
Direct Mount | |
Dimensions [mm] | 22 x 22 x 19 (L x W x H) |
Height of Platform above Ground [mm] | 19 |
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