XYZ-CLS32:32
Spezifikationen
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PDF-Download | Mechanical |
---|---|
Mechanical | |
Degrees of Freedom | 3 |
Stages used | CLS-3232 |
Travel [mm] | 21 (X); 21 (Y); 21 (Z) |
Payload [N] | 1.5 |
Closed-Loop | |
Closed-Loop | |
Sensor Resolution MCS2 [nm] | 1 (S) |
Breadboard Mount | |
Breadboard Mount | |
Dimensions [mm] | 65 x 65 x 59 (L x W x H) |
Center of vert. Stage above Ground [mm] | 43 (32.5 … 53.5) |
Direct Mount | |
Direct Mount | |
Dimensions [mm] | 48.5 x 32 x 54 (L x W x H) |
Center of vert. Stage above Ground [mm] | 38 (27.5 … 48.5) |
Zubehör
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