XYZ-CLS32:32

Based on three CLS-3232 stages with a travel range of 21 mm each, the system is able to handle payloads of up to 1.5N. Due to the compatibility with the SmarAct Modular System it can be easily upgraded.

Specifications

Download Spec Sheet
Download Spec Sheet Mechanical
Mechanical
Degrees of Freedom 3
Stages used CLS-3232
Travel [mm] 21 (X); 21 (Y); 21 (Z)
Payload [N] 1.5
  Closed-Loop
Closed-Loop
Sensor Resolution MCS2 [nm] 1 (S)
  Breadboard Mount
Breadboard Mount
Dimensions [mm] 65 x 65 x 59 (L x W x H)
Center of vert. Stage above Ground [mm] 43 (32.5 … 53.5)
  Direct Mount
Direct Mount
Dimensions [mm] 48.5 x 32 x 54 (L x W x H)
Center of vert. Stage above Ground [mm] 38 (27.5 … 48.5)

Downloads

Accessories

Related Products

Request product information

Do you have any questions about XYZ-CLS32:32 or would you like to request a quote?
Please fill out the form or contact us directly.

In order to process your request as quickly as possible, please include the name of your institution and its location in your message.

Any questions?
Contact us!

SmarAct

Technical Sales

Customer success stories, product
news and business insights.

I have read the privacy protection statement and accept it