XYZ-CLS32:32

Based on three CLS-3232 stages with a travel range of 21 mm each, the system is able to handle payloads of up to 1.5N. Due to the compatibility with the SmarAct Modular System it can be easily upgraded.

Step-file_XYZ-CLS32:32

Dec 18, 2019

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Technical-Drawing_XYZ-CLS32:32

Dec 18, 2019

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Specifications

Download Spec Sheet

Download Spec Sheet	Mechanical
Mechanical
Degrees of Freedom	3
Stages used	CLS-3232
Travel [mm]	21 (X); 21 (Y); 21 (Z)
Payload [N]	1.5
	Closed-Loop
Closed-Loop
Sensor Resolution MCS2 [nm]	1 (S)
	Breadboard Mount
Breadboard Mount
Dimensions [mm]	65 x 65 x 59 (L x W x H)
Center of vert. Stage above Ground [mm]	43 (32.5 … 53.5)
	Direct Mount
Direct Mount
Dimensions [mm]	48.5 x 32 x 54 (L x W x H)
Center of vert. Stage above Ground [mm]	38 (27.5 … 48.5)