CLS-92152 - 带EDU的线性位移台

较大的 CLS-92 线性平台占地面积为 152 x 92 毫米,行程范围为 103 毫米。此外,它还能处理高达 20 N 的有效载荷。

CLS 系列直线运动平台专为科学和工业领域的高可用性应用而设计。它们配备了 SmarActs 可更换驱动单元,确保可以方便地接触到平台的核心部件--压电驱动装置,从而使维修工作变得简单易行。更换驱动单元时,无需将整个设备从周围的定位装置上拆下。当模块化和配置简便成为最高要求时,它们就是完美的选择。

技术参数

下载规格表
下载规格表 机械参数
机械参数
行程 [mm] 103
阻挡力 [N] ≥ 3.5
最大法向力 [N] 20
尺寸 [mm] 152 x 92 x 17
重量 [g] 591
  开环
开环
Velocity [mm/s] > 20
Open-Loop Resolution MCS2 [nm] < 1
Open-Loop Resolution (H)CU [nm] < 50
  闭环
闭环
传感器分辨率 MCS2 [nm] 1 (S), 4 (L)
传感器分辨率 (H)CU [nm] 100 (L)
Uni-Directional Repeatability MCS2 [nm] ± 40 (S,L)
单向重复精度 (H)CU [nm] ± 200 (L)
  选项
选项
材料选项 Aluminum base as standard; Titanium base (-TI)
性能选项 Higher blocking force (-D): +1.5 N
真空选项 HV (1E-6 mbar); UHV (1E-11 mbar)
非磁性选项 Yes

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  • Technical-drawing_CLS92152
    Mar 02, 2020
  • Step-file_CLS92152
    Nov 13, 2019

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