XYZ-CLS52:52
Specifications
Download Spec Sheet
| Download Spec Sheet | Mechanical |
|---|---|
| Mechanical | |
| Degrees of Freedom | 3 |
| Stages used | CLS-5252 |
| Travel [mm] | 31 (X); 31 (Y); 31 (Z) |
| Payload [N] | 1.5 |
| Closed-Loop | |
| Closed-Loop | |
| Sensor Resolution MCS2 [nm] | 1 (S) |
| Breadboard Mount | |
| Breadboard Mount | |
| Dimensions [mm] | 65 x 65 x 59 (L x W x H) |
| Center of vert. Stage above Ground [mm] | 62 (46.5 … 77.5) |
| Direct Mount | |
| Direct Mount | |
| Dimensions [mm] | 79 x 63.5 x 89.5 (L x W x H) |
| Center of vert. Stage above Ground [mm] | 56 (40.5 … 71.5) |
Accessories
Related Products
Request product information
Do you have any questions about XYZ-CLS52:52 or would you like to request a quote?
Please fill out the form or contact us directly.
Any questions?
Contact us!
Contact us!