SMS-20-20 - 矩形孔径

SMS-20-20 由两个垂直方向的单缝组成。完全电动化,可精确确定矩形孔径的大小和位置。

四个可独立移动的叶片平行排列成两对,彼此呈矩形。该装置可独立确定开孔的宽度和高度,边长从 0 毫米到 20 毫米不等。位置传感器可对每个叶片进行闭环定位,从而在 20 x 20 毫米的外壳窗口内精确确定开孔的大小和位置。可提供用于高真空和超高真空环境的专用型号。还可提供定制版本。请随时与我们联系,讨论您的具体要求。

技术参数

下载规格表
下载规格表 机械参数
机械参数
尺寸 [mm] 85 x 85 x 21
重量 [g] 275
  开环
开环
Velocity [mm/s] > 20
开环分辨率 [nm] < 1
  闭环
闭环
传感器分辨率 MCS2 [nm] 1 (S) 4 (L)
单向重复精度 MCS2 [nm] ± 40 (S,L)
传感器分辨率 (H)CU [nm] 100 (L)
单向重复精度 (H)CU [nm] ± 300 (L)
  选项
选项
材料选项 Steel base (-ST); Titanium base (-TI); Black anodized (-BK)
真空选项 HV (1E-6 mbar); UHV (1E-11 mbar)
非磁性选项 Yes (-NM)

下载

  • Technical-Drawing_SMS-20-20
    Jan 12, 2023
  • Step-file_SMS-20-20
    Jan 12, 2023

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