SmarAct Metrology develops sophisticated equipment to serve high accuracy positioning and metrology applications in research and industry within fields such as optics, semiconductors and life sciences.

Our broad product portfolio – from miniaturized interferometers for displacement measurements to powerful electrical nanoprobers for the characterization of smallest semiconductor technology nodes – is completed by turnkey scanning microscopes which can be used in vacuum, cryogenic or other harsh environments. We maintain the complete production in house for a high level of customization so that we can always provide you the optimal individual or OEM solution. We also offer feasibility studies, measurement services and comprehensive support to accompany you along your projects.


Specific Market Products and Expertise

Metrology Products

High Precision Displacement Measurement Solutions


Learn about the technologies behind our products.