Ultra High Vacuum Piezo Stages
SmarAct’s stages and systems are not only perfectly suited for applications under atmo-spheric conditions, but in some cases also for more extreme environments like high vacuum (HV, 10-6 mbar) and ultra-high vacuum (UHV, 10-11 mbar).
Most of the stages presented on this website are available in versions specially prepared for operation under vacuum conditions.
UHV versions are bakeable at up to 150 °C and are available with two different cable types:
- The cost efficient version utilizes Teflon insulated wires.
- The Kapton® insulated version is a fluorine free solution.
Since SmarAct is a full solution provider, HV and UHV positioning systems are supplied with matching electrical feedthroughs. As standard, SmarAct uses:
- HV as bulkhead LEMO® feedthroughs which are O-ring sealed.
- UHV tightly welded designs for the use in UHV.
You are very welcome to contact our application scientists at any time to discuss your specific re-quirements.
For vacuum compatible stages of the SLC-17 and SLC-24 series that require post-installation baking, we recommend opting for the U-shaped base to increase the overall stiffness of the stage.
Please note that the U-shaped base has the usual mounting hole pattern, but increases the width of the stage itself by 6 mm. This changes the width of an SLC-17 stage to 23 mm and the width of an SLC-24 stage to 30 mm. Omitting the U-shaped base option is only advisable if compactness is the top requirement.
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Atmospheric Conditions
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High Vacuum (HV)
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Ultra-High Vacuum (UHV)
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Ultra-High Vacuum (UHVT)
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Pressure | -- | Down to 10-6 mbar | Down to 10-11 mbar | Down to 10-11 mbar |
Wiring | Teflon-insulated stranded wires with braided shield and Teflon coating | Teflon-insulated stranded wires with braided shield | Kapton-insulated stranded wires | Teflon-insulated stranded wires with braided shield |
Grease | Standard grease | HV compatible grease | Grease-free | Grease-free |
Sensor Options | S, L, I | S | S | S |
Bake-Out Temperatur | -- | Up to 130°C upon request | Recommended 130°C (max. 150°C) | Recommended 130°C (max. 150°C) |
Vacuum Feedthrough | -- | LEMO feedthroughs - O-ring tightened by a screw nut - Flanges available upon request |
LEMO compatible steel multipin or D-SUB15 PEEK feedthroughs welded into vacuum flange - DN40CF or DN63CF flange, other sizes upon request |
LEMO compatible steel multipin or D-SUB15 PEEK feedthroughs welded into vacuum flange - DN40CF or DN63CF flange, other sizes upon request |