PICOSCALE Vibrometer

The PICOSCALE Vibrometer is a turnkey solution for measuring the vibrations of micromechanical structures with sizes ranging from a few µm to several cm. Applications include the testing of MEMS, sensors, miniature loudspeakers, but also bearings and actuators. As the device is equipped with an integrated microscope and can measure up to 1 million pixels, it is ideal for visualizing vibration modes with high spatial and temporal resolution. The confocal design enables selective measurements on and through (semi-)transparent meterials like silicon, glass and water. By this, microstructures like MEMS can be analyzed through their packaging ensuring non-contact, non-invasive measurements.