SmarAct Modular and Customizable SEM Platform

The study and manipulation of material properties at sub-atomic scales are driving advances in quantum technologies, materials science, and semiconductor research. To support these developments, analytical methods must continually evolve, placing increasing demands on positioning accuracy, stability, and experimental adaptability.

One of SmarAct’s approaches is an ultra-compact, modular positioning platform that combines nanometer-precise motion with a minimal footprint. Featuring up to six degrees of freedom, it enables highly accurate sample positioning while maintaining a slim profile and allowing large tilt and rotation angles. At the same time, samples remain accessible from multiple directions, facilitating instrument integration, detector placement, and experimental flexibility.

Built around a configurable platform concept, the system can be tailored to specific application requirements through a wide selection of positioning stages, material options, drive technologies, and kinematic configurations, making it an ideal foundation for both new instrument developments and the modernization of existing systems.

The platform is particularly suited for Scanning Electron Microscopy (SEM), Scanning Transmission Electron Microscopy (STEM), Energy-Dispersive X-ray Spectroscopy (EDS), and X-ray Diffraction (XRD). Its modular design also supports advanced analytical techniques such as computer tomography, ptychography, crystallography, spectroscopy, and many types of in-situ experimentation.

The platform addresses the growing demand for flexible, future-ready instrumentation that can be easily integrated into existing laboratory and industrial setups. It provides users with a scalable solution that evolves alongside research objectives and helps optimize workflows.

Concept and Design

At the heart of the system is a high-precision sample stage for nanometer-accurate and repeatable sample positioning with up to six degrees of freedom.

The modular design allows different motion technologies and positioning axes to be combined within a single platform and expanded as requirements evolve, making the system equally suitable for exploratory laboratory environments, dedicated research infrastructures, and compact OEM integrations.

For applications requiring additional functionality, a standard 200 mm platform is available that can accommodate up to four optional functional modules simultaneously. This approach enables users to integrate complementary capabilities while preserving a compact and organized system layout.

The system, as well as the individual modules, can operate as completely autonomous solutions or be seamlessly integrated into existing control environments and automation frameworks. With its adaptable mechanical design, the sample manipulation platform—or selected subsystems—can be incorporated into a wide range of electron microscopes, scientific instruments, and other advanced analytical equipment with challenging demands regarding space constraints or environmental conditions.

The platform combines flexibility, precision, and system integration in a single concept. Whether aligning samples in highly focused beams, positioning specimens under electron optics, or developing sophisticated research instruments, the modular platform and its modules provide a reliable foundation for demanding applications where accuracy, adaptability, and multi-axis motion must meet spatial constraints or challenging environments.

Available modules include nano-probing towers with four-dimensional nanometer-precise positioning capabilities, automated sample changers for up to four sample holders, dedicated lift-out modules, and specific lift-out or sample transfer stages for advanced microscopy workflows.

Sample Stage

Featuring six degrees of freedom and a compact, space-saving silhouette, the stage enables highly versatile positioning capabilities within complex experimental setups. Built on a serial or parallel kinematic architecture with compucentric motion control, the system allows precise translational and rotational positioning while maintaining high stability and repeatability.

Its optimized mechanical design creates minimal shading, obstructing only 4% of the hemisphere above the sample and leaving 96% unobstructed and accessible for detectors, beam paths, and auxiliary instrumentation.

Researchers benefit from position resolutions in the nanometer and micro-degree range, repeatable return to defined coordinates, and support for both open-loop and closed-loop operation. Large rotational and tilt ranges of up to 360° for sample rotation and 180° for tip/tilt, combined with a 1-inch central aperture, provide the flexibility required for demanding diffraction and imaging experiments.

Automated motion sequences support efficient workflows and integration into advanced research environments, while the system’s precision enables applications such as image stitching and scanning across macroscopic sample areas, even when the beam source cannot be moved.

Other SmarAct positioning systems, such as SMARPOD, SMARGON, and TRIPOD, can also serve as sample stages, allowing users to take advantage of their specific features and benefits.

Probing Tower

The probing tower extends the capabilities of scanning electron microscopy environments by enabling electrical probing and characterization directly inside the microscope chamber.

Based on proven SMARPROBE technology, the system provides a generous 21 × 21 × 21 mm³ travel range, allowing up to four probe tips to access virtually any location on a typical SEM sample holder.

Designed for scientists and engineers working in semiconductor development, materials science, nanotechnology, and photonics, the probing tower combines precise motion control with versatile electrical measurement capabilities. The system supports a wide range of applications, from establishing defined electrical potentials and controlled sample contacting to localized charge dissipation on insulating surfaces.

Users can perform measurements ranging from straightforward single-point probing to sophisticated four-point characterization with optional biasing configurations. The platform is also suitable for advanced electron-beam-based techniques such as Electron Beam Absorbed Current (EBAC) and Electron Beam Induced Current (EBIC) analysis, enabling detailed investigation of device structures and material properties.

To maximize usability within confined SEM chambers, the probe towers can be moved into dedicated parking positions, providing optimal access to the sample whenever required. The motion architecture can be customized through SmarAct Motion Control, allowing application-specific kinematics and either independent operation or synchronized movement with the sample positioning system.

An integrated needle approach procedure supports reliable and controlled probe placement, helping to protect delicate samples and probe tips. For specialized applications, an optional etching station enables the fabrication of custom probe tip geometries tailored to specific measurement requirements.

Automatic Sample Exchange System

The Sample Changer extends the capabilities of a miniaturized sample stage by enabling the automated exchange of samples directly within the instrument environment.

Samples can be sequentially transferred between a dedicated reservoir and the sample stage without the need to vent the chamber, maintaining stable measurement conditions while reducing interruptions of ongoing experiments and analysis routines.

The sample carousel is currently configured to accommodate up to four standard sample holders or stubs, allowing multiple samples to be prepared in advance and processed in sequence. Following each exchange, the sample stage can automatically return to its original analysis position, supporting efficient and repeatable workflows.

To maximize access to the sample and minimize interference with detectors or imaging paths, the parking position of the sample changer can be individually defined to avoid shadowing effects and optimize the available workspace. A customizable sample holder concept further enhances flexibility by supporting a wide variety of sample sizes.

By automating routine handling steps and reducing manual intervention, the Sample Changer contributes to increased measurement throughput, improved utilization of valuable instrument time, and streamlined analytical processes where reliability, efficiency, and ease of use are essential.

Applications

Modern materials research increasingly relies on the combination of high-resolution imaging, analytical characterization, and precise sample manipulation. SmarAct’s high-precision positioning technology enables advanced workflows in Scanning Electron Microscopy (SEM), Scanning Transmission Electron Microscopy (STEM), Focused Ion Beam (FIB) systems, and Transmission Electron Microscopy (TEM), supporting demanding applications in materials science, semiconductor research, photonics, and nanotechnology.

The platform is equally suited for computer tomography and Volume SEM, where accurate sample positioning is essential for reconstructing complex three-dimensional structures. Researchers can perform Multi-Point Probing as well as advanced characterization techniques such as EBAC, EBIC, Cathodoluminescence (CL), Electron Energy Loss Spectroscopy (EELS), X-ray Diffraction, Energy-Dispersive Spectroscopy (EDS/EDX), and Wavelength-Dispersive Spectroscopy (WDS).

With nanometer-precise motion control and closed-loop feedback, the system provides exceptional flexibility for sample alignment and inspection. Its kinematic design enables almost 360° access to the specimen, allowing imaging and analysis from perspectives that are difficult to achieve with conventional stages.

This capability not only supports comprehensive scientific investigations but also enables the creation of striking visualizations and virtual sample flythroughs. By revealing structures from unexpected viewpoints, researchers can generate compelling images and presentations that communicate complex scientific results in a highly engaging and intuitive way.

Precision Positioning, Developed Together

SmarAct works closely with your team to develop a modular positioning concept tailored to your instrument and application.

With our customizable SEM platform, you gain precise positioning, flexible integration, and expert support from concept to implementation.

Talk to Our Expert Team!

Customization

Advanced research projects and high-tech industrial applications come with unique requirements. Whether operating in confined installation spaces, demanding vacuum environments, highly individualized experimental setups, or with special materials, SmarAct provides customized high-precision positioning solutions tailored to specific needs.

Building on a comprehensive portfolio that ranges from single-axis positioning stages and rotary stages to multi-axis systems, parallel kinematics, miniaturized robots, control systems, and metrology solutions, SmarAct enables scientists and engineers to configure positioning systems that precisely match their application requirements.

Individual adaptations can be realized to accommodate available space, specific mounting interfaces, environmental conditions, and performance targets. Depending on the application, travel ranges and rotation angles can be extended beyond standard configurations, providing greater flexibility for complex positioning tasks.

SmarAct solutions are designed for operation across a broad range of environmental conditions, from atmospheric pressure to high vacuum (HV, down to 1 × 10⁻⁶ mbar) and ultra-high vacuum (UHV, down to 1 × 10⁻¹¹ mbar). Configurations can also be adapted for cryogenic temperatures, high magnetic fields, and radiation-intensive environments, making them well suited for demanding applications in electron microscopy, spectroscopy, synchrotron beamlines, quantum technologies, and materials science.

With extensive in-house development, engineering, validation, and manufacturing capabilities, SmarAct delivers customized positioning solutions for a wide range of scientific and industrial applications while maintaining precision, reliability, and compact designs. The portfolio spans laboratory prototypes, specialized research instrumentation, OEM integrations, and production systems, supported by a comprehensive range of positioning technologies.

Configurations can be tailored from single-axis stages to complex multi-degree-of-freedom systems and fully integrated solutions to meet specific application requirements in research, development, and advanced manufacturing.

Control System & Software

The MCS2 Modular Control System is SmarAct’s most versatile platform for controlling high-precision positioning and automation systems. Designed for research, development, and industrial environments, its flexible, modular architecture supports a wide range of SmarAct positioning technologies. Available in tabletop, rack-mounted, and OEM configurations, the MCS2 can be tailored to individual system requirements and integrated into laboratory and automation environments via USB, Ethernet, or EtherCAT®. Advanced I/O functionality enables synchronization, triggering, and custom control procedures, while an optional hand control module provides intuitive manual operation.

A comprehensive software portfolio supports both system operation and application development. Well-documented APIs and Software Development Kits enable straightforward integration using Python, LabVIEW, C++, or C#, while SCoPE provides intuitive tools for setup, visualization, and system management. Integration with µManager supports microscopy and imaging applications. Optional kinematic modeling enables pose-based control of parallel kinematic systems, and an integrated waveform generator allows user-defined scan patterns for complex measurement and imaging workflows.

Customizable SEM Platform for Nanopositioning