EBAC/EBIC in-situ current amplifier

EBAC (Electron Beam Absorbed Current) and EBIC (Electron Beam Induced Current) are essential techniques in failure analysis, enabling rapid localization of electrical defects at the nanometer scale. SmarProbe integrates a high-sensitivity current amplifier directly within the probe holder. This in-situ design minimizes parasitic noise and signal loss, ensuring the highest fidelity in current detection. Switching between standard IV measurements and EBAC/EBIC modes is seamless—just one click in the intuitive SmarProbe GUI.

Compared to conventional external (ex-situ) amplifiers, the in-situ architecture offers two key advantages:

  1. Faster imaging and enhanced sensitivity: Even weak defect signatures are clearly resolved, while the required electron dose to the sample is significantly reduced—preserving sensitive structures.

  2. Wider dynamic range: Amplification switching becomes unnecessary, streamlining the measurement process and reducing user interaction.

Live overlay of the EBAC/EBIC signal onto the SEM image allows for immediate spatial correlation and intuitive defect localization. The SmarProbe GUI further enables color grading and histogram filtering, allowing users to suppress background noise and highlight relevant signals in real time.

The EBAC/EBIC option includes the SmarProbe Touch Controller and the Advanced Probe Holder, as seen in the image.