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Flexure Stages
SMARFLEX nanopositioning scanner stages use the advantages of piezo-driven mechanical flexures
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METIRIO Optical Encoder
Highly compact optical encoder for closed-loop nanopositioning
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Your Roadmap to Automation
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Strict modularity for fully automated microassembly stations.
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Cryogenic Positioning Systems
Non-Magnetic Piezo Stages and Systems
Ultra High Vacuum Piezo Stages and Systems
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MCS2 Housing
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SMARSLIDE – Stick-Slip Piezo Drives
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Key Features of the PICOSCALE Interferometer
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High Resolution Optical Displacement Measurements of a Piezo Scanner
Measurement of Radial Runout and Wobble
Single Point Vibration Measurement
Straightness Measurements of Translational Stages
Interferometric Sound Recording with a Glass Window
Interferometric Measurement with Chopped Beam
Closed-Loop Positioning with Interferometric Precision
Vibrometer
Key Features of the PICOSCALE Vibrometer
Components & Accessories
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Measuring Lateral Vibrations within all-Silicon Loudspeakers
Vibration Characterization of PiezoMUMPS
Profilometry, Modal Analysis and Q-Factor Measurement on PiezoMUMPS
Identifying unsound resonances of smartphone loudspeakers
Measuring the Mechanical Resonance of a Camera Unit within a Smartphone
Testing Ultrasonic Transducers with Vibrometry
Imaging Vibrations inside Acoustofluidic Devices
Measuring Cantilever Bending Modes and Displacements with sub-pm Resolution
Measuring Vibrations of Encapsulated MEMS
Measuring through Obstacles with Confocal Optics
Dissecting the Dynamic Response of an ultra-fast Actuated Mirror
Measuring Vibrations in Vacuum
Testing a Drone Motor with Single Point Vibrometry
Height and Vibration Measurements of Spiral-shaped Accelerometers
Single-Point Vibration Measurement on a Tungsten Cantilever
Sound Recording with a Glass Window
Encoder
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Readheads and Scales
Scale Options
Accessories
Application Notes & Documentation of the METIRIO® Encoder
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Nanoprober
Nanoprober Options
Options
In-situ EBAC/EBIC Current Amplifier
Automated Probe Landing & Surface Topography
Surface Cleaning for Reliable Electrical Contact
Prober Models
SMARPROBE Models
Etching Station
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Metrology Technologies
Michelson Interferometry
Sinusoidal Phase Modulation Interferometry
Confocal Optics
Vibration Analysis
Automation
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Medical Devices Manufacturing
Industrial Manufacturing
Semiconductor
Automation Services
Your Roadmap to Automation
Process Development for Microassembly Challenges
Contract Manufacturing for Engineering and Series
Service Agreements
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Automation Platform
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Handling Module with Top View Camera
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SmarAct Trade Shows
Throughout the year the SmarAct sales team visits over 25 trade shows and meetings with different scientific and industrial focal points.
SmarAct
Trade Shows
Jan
19
2026
Max IV User Meeting
Lund
Sweden
Jan 19, 2026–Jan 21, 2026
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Max IV User Meeting
Jan
20
2026
Photonics West
San Francisco, CA
United States
Jan 20, 2026–Jan 22, 2026
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Photonics West
Jan
25
2026
MEMS
Salzburg
Austria
Jan 25, 2026–Jan 29, 2026
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MEMS
Feb
02
2026
ESRF UM 2026
Grenoble
France
Feb 02, 2026–Feb 04, 2026
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ESRF UM 2026
Feb
04
2026
APE Photonics Expo
Singapour
Singapore
Feb 04, 2026–Feb 06, 2026
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APE Photonics Expo
Feb
22
2026
SPIE Advanced ithography + Patterning
San Jose
United States
Feb 22, 2026–Feb 26, 2026
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SPIE Advanced ithography + Patterning
Feb
24
2026
EPIC Technology Meeting on Integrated Photonics
Enschede
Netherlands
Feb 24, 2026–Feb 25, 2026
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EPIC Technology Meeting on Integrated Photonics
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