SMARPROBE Customization
Configure the SMARPROBE to your exact needs.
SMARPROBE SP4 & SP8
The SMARPROBE was developed to take nanometer-resolved closed-loop probing to the next level. It comes with 4 or 8 closed-loop manipulators.
SMARPROBE - nanoprobing made easy
Exceptional performance
- Fully encoded with 1 nm resolution
- Active position holding
- Large scan-range and low thermal drift
- Large area probing on full 30 x 30 mm
- High-speed EBAC/EBIC imaging
Efficient and easy
- All-in-one user interface
- Automatic landing and alignment of all probes
- “Point & Click” navigation within the SEM image
- Group movements and “Step & Repeat”
- CAD navigation for sample and probes