SMARPROBE Customization

Configure the SMARPROBE to your exact needs.

SMARPROBE SP4 & SP8

The SMARPROBE was developed to take nanometer-resolved closed-loop probing to the next level. It comes with 4 or 8 closed-loop manipulators.

SMARPROBE - nanoprobing made easy

Exceptional performance

  • Fully encoded with 1 nm resolution
  • Active position holding
  • Large scan-range and low thermal drift
  • Large area probing on full 30 x 30 mm
  • High-speed EBAC/EBIC imaging

 

Efficient and easy

  • All-in-one user interface
  • Automatic landing and alignment of all probes
  • “Point & Click” navigation within the SEM image
  • Group movements and “Step & Repeat”
  • CAD navigation for sample and probes