Vibration Characterization of PiezoMUMPS
This study compares circular and ring-shaped piezo-electrode geometries in 1 MHz PMUTs fabricated via the PiezoMUMPs process. FEM simulations and experimental validation using a SmarAct PICOSCALE Vibrometer show that optimized ring electrodes—extending slightly beyond the membrane edge—minimize resonant frequency shifts and displacement loss while enhancing receive sensitivity. The results support improved PMUT design for high-performance ultrasonic applications.
Role of the PICOSCALE Vibrometer
- The PICOSCALE Vibrometer from SmarAct was used to measure the out-of-plane displacement of the PMUT membranes.
- This measurement technique is critical for validating FEM (Finite Element Method) simulations, especially for detecting resonance frequencies, displacement amplitudes, and voltage outputs associated with different electrode geometries.
- Specifically, the vibrometer confirmed vibration behavior that was simulated to identify optimal ring-electrode geometries minimizing frequency shifts and displacement reductions.
- The measurements directly support the theoretical predictions and validate the optimized geometries discussed in the study
Conclusion
The PICOSCALE Vibrometer played a key role in validating the simulated mechanical behavior of the PMUT membranes by precisely measuring their displacement responses. Its high-resolution vibrometric measurements confirmed the optimized ring-electrode designs and supported the experimental verification of resonant frequency shifts and piezoelectric performance.
Acknowledgment
We thank Dinko Oletić and his team at the University of Zagreb for their valuable cooperation and for providing access to their work and experimental data.
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