High-efficiency atmospheric water harvesting enabled by ultrasonic extraction
The article “High-efficiency atmospheric water harvesting enabled by ultrasonic extraction” (Nature Communications, 2025) presents a groundbreaking method for extracting water from air without relying on heat-based…
Profilometry, Modal Analysis and Q-Factor Measurement on PiezoMUMPS
This work presents a cantilever-based piezoelectric MEMS resonator array, developed using the PiezoMUMPs process, for passive frequency decomposition of ultrasonic acoustic emission (AE) signals in the 90–250 kHz…
Measuring MEMS Vibrations Through a Packaging of Silicon
This application note demonstrates how SmarAct’s PICOSCALE Vibrometer enables direct, non-invasive measurement of MEMS vibrations through silicon packaging. Using infrared (1550 nm) confocal imaging, the system…
Vibration Characterization of PiezoMUMPS
This study compares circular and ring-shaped piezo-electrode geometries in 1 MHz PMUTs fabricated via the PiezoMUMPs process. FEM simulations and experimental validation using a SmarAct PICOSCALE Vibrometer show…
Height and Vibration Measurements of Spiral Shaped Accelerometers
This application note demonstrates how SmarAct’s PICOSCALE Vibrometer can be used to characterize spiral-shaped accelerometers through both height mapping and vibration analysis. Using phase-unwrapped interferometry…
Dissecting the Dynamic Response of an Ultra-Fast Actuated Mirror
This application note illustrates how SmarAct’s PICOSCALE Vibrometer enables detailed analysis of the dynamic response of piezo-actuated mirrors. By measuring individual components—the bare piezo ring, mirror…
Measuring Through Obstacles with Confocal Optics
This application note shows how SmarAct’s PICOSCALE Vibrometer uses confocal optics to perform high-precision vibration measurements and imaging—even when the measurement path is obstructed by windows or…
Measuring Cantilever Bending Modes and Displacements with sub-pm Resolution
This application note demonstrates how SmarAct’s PICOSCALE Vibrometer enables high-resolution, contactless analysis of vibrational modes and displacements in micro cantilevers. Unlike conventional optical beam…
Imaging Vibrations Inside Acoustofluidic Devices
This application note illustrates how SmarAct’s PICOSCALE Vibrometer enables the selective imaging of vibrations on internal surfaces of acoustofluidic devices. Its infrared confocal measurement principle allows…
Testing Ultrasonic Transducers with Vibrometry
This application note demonstrates how SmarAct’s PICOSCALE Vibrometer can be used to characterize ultrasonic transducers by measuring their mechanical response to electrical excitation. With high temporal resolution…
Measuring the Mechanical Resonance of a Camera Unit within a Smartphone
This application note presents how SmarAct’s PICOSCALE Vibrometer was used to measure the mechanical resonance of a smartphone camera unit—without disassembly. By detecting the response of the autofocus stage to…
Measuring Lateral Vibrations within all-Silicon Loudspeakers
This application note demonstrates how SmarAct’s PICOSCALE Vibrometer enables the characterization of lateral vibrations in encapsulated all-silicon MEMS loudspeakers. By combining infrared confocal microscopy with…
Specification Sheets
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Specification Sheet - PICOSCALE Vibrometer System Controller V1.51.1 MiB
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Specification Sheet - PICOSCALE Vibrometer Sensor Head Type F03553.3 KiB
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Specification Sheet - PICOSCALE Vibrometer Shaker Stage V1.0242.3 KiB
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Specification Sheet - PICOSCALE Vibrometer Stage Controller V1.5430.4 KiB
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Specification Sheet - PICOSCALE Vibrometer XYZ Positioning System V1.0150.9 KiB