METIRIO® - Performance

Key Features of the METIRIO® Encoder:

  • Compact Size 6.6 x 5.1 x 1.7 mm
  • High Resolution: 0.4 nm @ 20 mm/s
  • Positioning Speed: up to 10 m/s
  • UHV compatibility down to 10-11 mbar
  • Operating Temperature Range: 0 °C – 80 °C
  • Rough environments with mechanical vibrations
  • Compatible with a broad variety of reflecting scales with 20 µm pitch

METIRIO® - Operating Principle

The integrated light source illuminates a scale comprising an incremental grating with 20 µm pitch and a track with reference marks for absolute positioning. The reflected light generates an interference pattern which is detected by the diode array within the readhead. A relative movement between the scale and the readhead leads to analog sine and cosine signals as well as a TTL-shaped reference mark.

Miniaturized OEM-Readhead for high Precision Motion Analysis

Key Applications

The unique combination of features makes the Metirio an ideal solution in a variety of industries, and it has been successfully implemented in robotics systems, semiconductor manufacturing technology, microscopy stages and more.

High-resolution Ultra Compact Motion Stages

When SmarAct Motion was developing their ultra-compact piezo stick-slip stages, they required a high-resolution optical encoder that met strict specifications. No existing market options could fulfill all the needs for ultra-high vacuum (UHV) compatibility, sub-nanometer precision, low power consumption, and minimal size. The METIRIO® Optical Encoder was developed to meet these demands, making it the ideal solution. Today, these stages are widely used in high-precision metrology applications across industries such as semiconductors and life sciences. This versatility makes METIRIO® an excellent choice for any demanding application requiring compact and precise motion control.

Motion Systems inside Vacuum Chambers or Electron Microscopes

The Metirio optical encoder is an ideal solution for vacuum applications due to its non-outgassing materials and controlled heat dissipation. This is especially beneficial for environments sensitive to contamination or thermal changes, as maintaining a stable operational temperature is critical in such settings. The Metirio’s power-down functionality enables rapid cycling between operational and idle states, further reducing heat build-up during periods of inactivity. This precise thermal management makes it particularly suitable for vacuum environments where controlling temperature is essential for ensuring the integrity of experiments or processes. Additionally, the venting slots integrated into its design ensure quick evacuation in vacuum conditions, making it a reliable and efficient choice for applications requiring both high precision and environmental control​​.