METIRIO® is a high-precision optical encoder designed and manufactured for closed-loop nanopositioning to achieve maximum miniaturisation, high resolution and speed.
METIRIO® - Performance
Key Features of the METIRIO® Encoder:
- Compact Size 6.6 x 5.1 x 1.7 mm
- High Resolution: 0.4 nm @ 20 mm/s
- Positioning Speed: up to 10 m/s
- UHV compatibility down to 10-11 mbar
- Operating Temperature Range: 0 °C – 80 °C
- Vibration resistant according to DIN EN 60068-2-6
- Shock resistant according to DIN EN 60068-2-27
- Compatible with a broad variety of reflecting scales with 20 µm pitch
METIRIO® - Operating Principle
What is an optical encoder?
An optical encoder is a device that outputs precise electrical signal that correlate exactly with the linear motion along a guide or the angular displacement of a rotating shaft. The encoder uses optical sensors to interpret equally distributed scale markings and provides this positional data in both analogue and digital form. This data can then be seamlessly integrated into motion controllers to provide real-time positional feedback.
How does it work?
To enable precise motion control, the METIRIO® Optical Encoder converts movement along a reflective scale into electrical output signals that provide information about displacement and direction.
An integrated light source illuminates a scale with an incremental grating of 20 µm pitch and an additional track carrying reference marks for absolute positioning. The reflected light generates an interference pattern, which is detected by the fotodiode array inside the read head. Relative motion between the scale and the read head produces analog sine and cosine signals, as well as a TTL-shaped reference mark.
Miniaturized OEM-Readhead for high Precision Motion Analysis
Key Applications
The unique combination of features makes the Metirio an ideal solution in a variety of industries, and it has been successfully implemented in robotics systems, semiconductor manufacturing technology, microscopy stages, and more.
High-resolution Ultra Compact Motion Stages
When SmarAct Motion was developing their ultra-compact piezo stick-slip stages, they required a high-resolution optical encoder that met strict specifications. No existing market options could fulfill all the needs for ultra-high vacuum (UHV) compatibility, sub-nanometer precision, low power consumption, and minimal size. The METIRIO® Optical Encoder was developed to meet these demands, making it the ideal solution. Today, these stages are widely used in high-precision metrology applications across industries such as semiconductors and life sciences. This versatility makes METIRIO® an excellent choice for any demanding application requiring compact and precise motion control.
The miniature readhead of the METIRIO® Encoder ist he basis for all our designs. Here you can find an overview of he different housing and scale options.
Motion Systems inside Vacuum Chambers or Electron Microscopes
The Metirio optical encoder is an ideal solution for vacuum applications due to its non-outgassing materials and controlled heat dissipation. This is especially beneficial for environments sensitive to contamination or thermal changes, as maintaining a stable operational temperature is critical in such settings. The Metirio’s power-down functionality enables rapid cycling between operational and idle states, further reducing heat build-up during periods of inactivity. This precise thermal management makes it particularly suitable for vacuum environments where controlling temperature is essential for ensuring the integrity of experiments or processes. Additionally, the venting slots integrated into its design ensure quick evacuation in vacuum conditions, making it a reliable and efficient choice for applications requiring both high precision and environmental control.
METIRIO® in platform for cryo-nano positioning
As part of the SAPOTI project (Scanning Analysis by PtychO for Tomographic Imaging) at the CARNAÚBA nanoprobe beamline of the Brazilian synchrotron source Sirius, the METIRIO® encoder from SmarAct Metrology was used as an integral part of the cryo-nanopositioning platform. The sample is positioned relative to the X-ray optics with subnanometer resolution under extreme environmental conditions: ultra-high vacuum (UHV), temperatures down to 100 K, and active vibration compensation.