The integrated light source illuminates a scale comprising an incremental grating with 20 µm pitch and a track with reference marks for absolute positioning. The reflected light generates an interference pattern which is detected by the diode array within the readhead. A relative movement between the scale and the readhead leads to analog sine and cosine signals as well as a TTL-shaped reference mark.

METIRIO® - Performance and Operating Principle

Key Features of the METIRIO® Encoder:

  • Compact Size 6.6 x 5.1 x 1.7 mm
  • High Resolution: 0.4 nm @ 1 m/s
  • Positioning Speed: up to 10 m/s
  • UHV compatibility down to 10-11 mbar
  • Operating Temperature Range: 0 °C – 80 °C
  • Rough environments with mechanical vibrations
  • Compatible with a broad variety of reflecting scales with 20 µm pitch

Miniaturized OEM-Readhead for high Precision Motion Analysis

Key Features – Application

  • Closed Loop Motion Systems
  • CMM (Coordinate Measurement Machines)
  • CNC-Milling
  • Semiconductor Industry
  • Gauge for Displacement Measurement Systems
  • High Precision Sample Scanning in Life Science and Microscopy
  • High Resolution 3D-Printing
  • Research & Development