A piezo actuator is coupled to the slide of the guideway by a friction element that is permanently fixed to the actuator. The piezo actuator itself is fixed at the stationary base of the stage.

The piezo actuator is changing its length proportional to the applied voltage. Because of the controlled ramp-up of the applied voltage to the piezo, it will enlarge or shrink, and the friction coupled slide will follow the movement of the friction element. This phase is called stick-phase.

A sharp decrease or increase of the applied voltage will cause a shortening or lengthening of the piezo on a very short time scale which yields to a very fast movement of the friction element. As a result, the friction element is changing its position, while the slide does not follow. This phase is called slip phase. By repeating this sequence, a macroscopic travel of the slide can be achieved. This mode is called step mode.

During the stick-phase the slide can be moved by slowly enlarging or shortening of the piezo actuator with sub-nanometer resolution.