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Flexure Stages
SMARFLEX nanopositioning scanner stages use the advantages of piezo-driven mechanical flexures
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METIRIO Optical Encoder
Highly compact optical encoder for closed-loop nanopositioning
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Strict modularity for fully automated microassembly stations.
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SMARSLIDE – Stick-Slip Piezo Drives
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Key Features of the PICOSCALE Interferometer
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High Resolution Optical Displacement Measurements of a Piezo Scanner
Measurement of Radial Runout and Wobble
Single Point Vibration Measurement
Straightness Measurements of Translational Stages
Interferometric Sound Recording with a Glass Window
Interferometric Measurement with Chopped Beam
Closed-Loop Positioning with Interferometric Precision
Vibrometer
Key Features of the PICOSCALE Vibrometer
Components & Accessories
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Measuring Lateral Vibrations within all-Silicon Loudspeakers
High-Efficiency Atmospheric Water Harvesting enabled by Ultrasonic Extraction
Vibration Characterization of PiezoMUMPS
Profilometry, Modal Analysis and Q-Factor Measurement on PiezoMUMPS
Measuring the Mechanical Resonance of a Camera Unit within a Smartphone
Testing Ultrasonic Transducers with Vibrometry
Imaging Vibrations inside Acoustofluidic Devices
Measuring Cantilever Bending Modes and Displacements with sub-pm Resolution
Measuring Vibrations of Encapsulated MEMS
Measuring through Obstacles with Confocal Optics
Dissecting the Dynamic Response of an ultra-fast Actuated Mirror
Testing a Drone Motor with Single Point Vibrometry
Height and Vibration Measurements of Spiral-shaped Accelerometers
Single-Point Vibration Measurement on a Tungsten Cantilever
Sound Recording with a Glass Window
Encoder
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Application Notes & Documentation of the METIRIO® Encoder
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Nanoprober
Nanoprober Options
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In-situ EBAC/EBIC Current Amplifier
Automated Probe Landing & Surface Topography
Surface Cleaning for Reliable Electrical Contact
Prober Models
SMARPROBE Models
Etching Station
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Michelson Interferometry
Sinusoidal Phase Modulation Interferometry
Confocal Optics
Vibration Analysis
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Medical Devices Manufacturing
Industrial Manufacturing
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Your Roadmap to Automation
Process Development for Microassembly Challenges
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Service Agreements
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Handling Module with Top View Camera
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SmarAct Trade Shows
Throughout the year the SmarAct sales team visits over 25 trade shows and meetings with different scientific and industrial focal points.
SmarAct
Trade Shows
Mar
24
2026
EMIM
Lubljana
Slovenia
Mar 24, 2026–Mar 27, 2026
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EMIM
Mar
24
2026
Analytica 2026
München
Germany
Mar 24, 2026–Mar 27, 2026
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Analytica 2026
Apr
22
2026
AKL
Aachen
Germany
Apr 22, 2026–Apr 24, 2026
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AKL
May
05
2026
Quantum Photonics
Erfurt
Germany
May 05, 2026–May 06, 2026
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Quantum Photonics
May
05
2026
OPTATEC
Frankfurt
Germany
May 05, 2026–May 07, 2026
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OPTATEC
May
17
2026
IPAC 2026
Deauville
France
May 17, 2026–May 22, 2026
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IPAC 2026
May
25
2026
E-MRS Spring meeting 2026
Strasbourg
France
May 25, 2026–May 29, 2026
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E-MRS Spring meeting 2026
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