SPIE Photomask Tech + EUV Lithography

Join us at SPIE Photomask Technology + EUV Lithography 2025, taking place from September 23 to 24, 2025 in Monterey, California, USA!
SmarAct Inc. will showcase cutting-edge high-precision positioning, automation, and metrology solutions - featuring SMARFLEX nanopositioning scanners, METIRIO® closed-loop encoders, and modular automation platforms. See live demonstrations of sub-micron alignment, open- and closed-loop piezo scanner performance, and interferometric-level precision - engineered for the photomask and EUV lithography community.
Visit us at booth 403, meet our experts, and discover how SmarAct can enhance your development processes. We look forward to seeing you in Monterey!