SMARPROBE - precision redefined by closed-loop control
Thanks to its fully closed-loop controlled motion system, the SmarProbe enables positioning with unmatched repeatability and stability – even at the nanometer scale. This eliminates drift, manual correction and guesswork during probing, making complex measurements faster, more reliable, and highly automatable. That’s what closed-loop means – and that’s what makes the difference.
- Semi-blind nanoprobing of all available nodes
- Automatic probe landing and alignment
- Large area probing on full 30 x 30 mm
- High-speed EBAC/EBIC imaging
- CAD navigation
- All-in-one user interface
- In-situ sample cleaning
