SMARPOD P-SLC-17

A mid-size SMARPOD based on SLC-17 stages in a parallel orientation that is able to position payloads of up to 5 N.

The SMARPOD P-SLC-17 is based on a different mechanical design in relation to the orientation of the horizontally mounted stages. In comparison with a circular SMARPOD of nearly the same size, the P-SLC-17 offers a much larger travel range in dispense of the aperture that is available in the circular designs.
Based on SLC-17 Series stages, the SMARPOD P-SLC-17 is also available in a high and ultra-high vacuum version as well as a version that is made out of fully non-magnetic materials.

Technical-Drawing_SmarPod-P-SLC-17

Feb 19, 2020

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Step-file_SmarPod-P-SLC-17

Jun 26, 2019

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Specifications

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Download Spec Sheet	Mechanical
Mechanical
Travel [mm]	48 (X); 28 ... 48 (Y); ≤ 9 (Z)
Travel [°]	≤ 28 (Θx); ≤ 26 (Θy); ≤ 20 (Θz)
Max. Normal Force [N]	5
Max. Horizontal Force [N]	2.5
Dimensions [mm]	110 x 80
Height of Platform above Ground [mm]	67.5
Weight [g]	300 ... 2000
	Closed-Loop
Closed-Loop
Sensor Types	S; SC
Smallest Increment [nm]	1
Smallest Increment [µrad]	1
Closed-Loop Repeatability, Full Stroke MCS2 [nm]	< ± 200
Closed-Loop Repeatability, 1 mm Travel MCS2 [nm]	< ± 10
Closed-Loop Repeatability, Full Stroke MCS2 [µrad]	< ± 15
	Options
Options
Vacuum Options	HV (1E-6 mbar); UHV / UHVT (1E-11 mbar)
Non-Magnetic Option	Yes (-NM)