A mid-size SMARPOD based on SLC-17 stages in a parallel orientation that is able to position payloads of up to 5 N.

The SMARPOD P-SLC-17 is based on a different mechanical design in relation to the orientation of the horizontally mounted stages. In comparison with a circular SMARPOD of nearly the same size, the P-SLC-17 offers a much larger travel range in dispense of the aperture that is available in the circular designs.
Based on SLC-17 Series stages, the SMARPOD P-SLC-17 is also available in a high and ultra-high vacuum version as well as a version that is made out of fully non-magnetic materials.

  • Technical-Drawing_SmarPod-P-SLC-17
    Feb 19, 2020
  • Step-file_SmarPod-P-SLC-17
    Jun 26, 2019


Download Spec Sheet
Download Spec Sheet Mechanical
Travel [mm] 48 (X); 28 ... 48 (Y); ≤ 9 (Z)
Travel [°] ≤ 28 (Θx); ≤ 26 (Θy); ≤ 20 (Θz)
Max. Normal Force [N] 5
Max. Horizontal Force [N] 2.5
Dimensions [mm] 110 x 80
Height of Platform above Ground [mm] 67.5
Weight [g] 300 ... 2000
Sensor Types S; SC
Smallest Increment [nm] 1
Smallest Increment [µrad] 1
Closed-Loop Repeatability, Full Stroke MCS2 [nm] < ± 200
Closed-Loop Repeatability, 1 mm Travel MCS2 [nm] < ± 10
Closed-Loop Repeatability, Full Stroke MCS2 [µrad] < ± 15
Vacuum Options HV (1E-6 mbar); UHV / UHVT (1E-11 mbar)
Non-Magnetic Option Yes (-NM)


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