Precise Depth Control for Nanoscale Scratching with METIRIO A1

In a nanoscratching experiment aimed at creating variable-depth structures at the nanometer scale, the METIRIO A1 encoder from SmarAct Metrology was used to monitor and control a four-degree-of-freedom piezoelectric platform. The platform precisely guided a diamond-tip tool along three linear axes and rotationally around the Z-axis, enabling the direct fabrication of complex surface patterns such as nested rectangles and concentric circles.

Throughout the process, the platform followed predefined trajectories across stainless steel, aluminum, and copper surfaces. The METIRIO A1 provided continuous, real-time position data with a dynamic resolution of 1 nm. This feedback enabled the control system to automatically adjust the actuation voltage in response to the desired depth and surface geometry—ensuring precise and consistent structure formation throughout the experiment.

Thanks to the encoder’s high-resolution data and real-time response, the platform achieved highly uniform, reproducible nanostructures. The system could instantly react to deviations, allowing dynamic process optimization across a range of materials. With its compact design, exceptional accuracy, and seamless integration, the METIRIO A1 is a powerful solution for advanced nanofabrication applications in research and industry.^[1]

^[1]https://doi.org/10.1088/1361-665X/ad8498