CLS-9292 - Linear Stage with EDU
Linear stages of the CLS series were consistently designed for high availability applications in science and industry. They are equipped with SmarActs exchangeable drive units which guarantees easy access to the stage's core component, the piezo-drive. That makes servicing a very simple task. The drive unit can be exchanged without removing the complete device from the surrounding positioning setup. Additionally, their mounting hole pattern is perfectly matched to mount our rotation stages and goniometers.
Specifications
| Download Spec Sheet | Mechanical |
|---|---|
| Mechanical | |
| Travel [mm] | 63 |
| Blocking Force [N] | ≥ 3.5 |
| Max. Normal Force [N] | 20 |
| Dimensions [mm] | 92 x 92 x 17 |
| Weight [g] | 357 |
| Open-loop | |
| Open-loop | |
| Velocity [mm/s] | > 20 |
| Open-Loop Resolution MCS2 [nm] | < 1 |
| Open-Loop Resolution (H)CU [nm] | < 50 |
| Closed-Loop | |
| Closed-Loop | |
| Sensor Resolution MCS2 [nm] | 1 (S), 4 (L) |
| Sensor Resolution (H)CU [nm] | 100 (L) |
| Uni-Directional Repeatability MCS2 [nm] | ± 40 (S,L) |
| Uni-Directional Repeatability (H)CU [nm] | ± 200 (L) |
| Options | |
| Options | |
| Material Options | Aluminum base as standard; Titanium base (-TI) |
| Performance Options | Higher blocking force (-D): +1.5 N |
| Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |
| Non-Magnetic Option | Yes |
Accessories
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