CLS-9292 - Linear Stage with EDU

The smaller one of the CLS-92 linear stages offers a footprint of 92 x 92 mm and a travel range of 63 mm. Furthermore it is able to handle payloads of up to 20 N.

Linear stages of the CLS series were consistently designed for high availability applications in science and industry. They are equipped with SmarActs exchangeable drive units which guarantees easy access to the stage's core component, the piezo-drive. That makes servicing a very simple task. The drive unit can be exchanged without removing the complete device from the surrounding positioning setup. Additionally, their mounting hole pattern is perfectly matched to mount our rotation stages and goniometers.

  • Technical-drawing_CLS9292
    Mar 02, 2020
  • Step-file_CLS9292
    Nov 13, 2019


Download Spec Sheet
Download Spec Sheet Mechanical
Travel [mm] 63
Blocking Force [N] ≥ 3.5
Max. Normal Force [N] 20
Dimensions [mm] 92 x 92 x 17
Weight [g] 357
Velocity [mm/s] > 20
Open-Loop Resolution MCS2 [nm] < 1
Open-Loop Resolution (H)CU [nm] < 50
Sensor Resolution MCS2 [nm] 1 (S), 4 (L)
Sensor Resolution (H)CU [nm] 100 (L)
Uni-Directional Repeatability MCS2 [nm] ± 40 (S,L)
Uni-Directional Repeatability (H)CU [nm] ± 200 (L)
Material Options Aluminum base as standard; Titanium base (-TI)
Performance Options Higher blocking force (-D): +1.5 N
Vacuum Options HV (1E-6 mbar); UHV (1E-11 mbar)
Non-Magnetic Option Yes


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