SLC-1760 - Linear Piezo Stage

At dimensions of 60 x 17 x 8.5 mm, the SLC-1760 offers a travel range of 41 mm and a normal force of 30 N.

Please note that the downloadable documents for this linear piezo stage show the dimensions and specifications of an SLC-1760 for atmospheric or HV environments, equipped with an S-position sensor. For technical drawings and detailed specifications of other variants, such as UHV compatible stages, stages with higher blocking force or other sensor options, please contact us at any time.

  • Step-file_SLC-1760-Non-Magnetic
    Mar 17, 2020
  • Technical-Drawing_SLC-1760
    Dec 03, 2019
  • Step-file_SLC-1760_with_U-shaped-base
    Dec 03, 2019
  • Step-file_SLC-1760
    Dec 03, 2019
  • Technical-Drawing_SLC-1760_with_U-shaped-base
    Dec 03, 2019

Specifications

Download Spec Sheet
Download Spec Sheet Mechanical
Mechanical
Scan Range [µm] > 1.3
Travel [mm] 41
Blocking Force [N] ≥ 3.5
Max. Normal Force [N] 30
Max. Lift Force [N] > 1.5
Dimensions [mm] 60 x 17 x 8.5
Weight [g] 38
  Open-loop
Open-loop
Velocity [mm/s] > 20
Open-Loop Resolution MCS2 [nm] < 1
Open-Loop Resolution (H)CU [nm] < 50
  Closed-Loop
Closed-Loop
Sensor Resolution MCS2 [nm] 1 (S), 4 (L)
Sensor Resolution (H)CU [nm] 100 (L)
Uni-Directional Repeatability MCS2 [nm] ± 40 (S,L)
Uni-Directional Repeatability (H)CU [nm] ±200 (L)
  Options
Options
Material Options Aluminum base as standard; Steel base (-ST); Titanium base (-TI); Black anodized (-BK)
Mechanical Options U-shaped base for higher mechanical strength (-W): width is 6 mm larger; cage-creep-free guideways (-Z)
Performance Options Higher blocking force (-D): +1.5 N
Cryogenic Option Yes (only open loop, travel restricted to 41 mm)
Vacuum Options HV (1E-6 mbar); UHV (1E-11 mbar)
Non-Magnetic Option Yes, changes of the slide hole pattern apply: all threaded holes

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