The SMARPROBE SP4 offers 4 manipulators, while the SP6 expands this to 6, and the SP8 supports up to 8 manipulators. Each system includes one sample stage. All manipulators feature three degrees of freedom and are equipped with nanometer-resolution optical encoders for high-precision electrical probing. Smart positioning routines implemented in the dedicated control software, together with the ability to load up to four SEM sample stubs, maximize operating ease and throughput for any nanoprobing task.
Built on SmarAct’s leading know-how in piezo-based nanopositioning, the robust mechanical design guarantees the highest stability and intuitive operation. All SMARPROBE systems are compatible with a wide range of FIBs, SEMs, and optical microscopes, making them an ideal solution both for retrofitting existing workflows and for integration into new instruments.
The SMARPROBE probing systems support electrical characterization techniques ranging from 2-contact EBIC/EBAC to advanced 4- and 6-point probing measurements, making them an indispensable tool for semiconductor failure analysis labs.

Key Benefits:

• Semi-blind operation in the SEM. Thanks to active position holding, low thermal drift and Point&Click functionality, probe positioning can be performed with minimal electron beam exposure, preserving sensitive structures and probe tips.
• Fast, flexible installation. Compatible with most SEM, FIB, and optical systems, the SMARPROBE platforms are easily installed and integrated — perfect for both new setups and retrofit upgrades.
• Service-friendly with exchangeable drive units. SmarAct’s proven EDU concept ensures fast, hassle-free maintenance without recalibration of your entire probing system, minimizing downtime and ensuring maximum system availability.

¹ Vibration-free travel range. Longer travel ranges are performed with the low-vibration mode, ensuring safe navigation.

² Active temperature control makes the thermal drift independent of the surrounding conditions.