XY-SLC17:30
Specifications
Download Spec Sheet
| Download Spec Sheet | Mechanical |
|---|---|
| Mechanical | |
| Degrees of Freedom | 2 |
| Stages used | SLC-1730 |
| Travel [mm] | 21 (X); 21 (Y) |
| Payload [N] | 20 |
| Closed-Loop | |
| Closed-Loop | |
| Sensor Resolution MCS2 [nm] | 1 (S) |
| Breadboard Mount | |
| Breadboard Mount | |
| Dimensions [mm] | 65 x 65 x 22 (L x W x H) |
| Height of Platform above Ground [mm] | 22 |
| Direct Mount | |
| Direct Mount | |
| Dimensions [mm] | 22 x 22 x 17 (L x W x H) |
| Height of Platform above Ground [mm] | 17 |
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