XYZ-SLC17:30
Specifications
Download Spec Sheet
Download Spec Sheet | Mechanical |
---|---|
Mechanical | |
Degrees of Freedom | 3 |
Stages used | SLC-1730 |
Travel [mm] | 21 (X); 21 (Y); 21 (Z) |
Payload [N] | 1.5 |
Closed-Loop | |
Closed-Loop | |
Sensor Resolution MCS2 [nm] | 1 (S) |
Breadboard Mount | |
Breadboard Mount | |
Dimensions [mm] | 65 x 65 x 58 (L x W x H) |
Center of vert. Stage above Ground [mm] | 42 (31.5 ... 52.5) |
Direct Mount | |
Direct Mount | |
Dimensions [mm] | 38 x 32 x 53 (L x W x H) |
Center of vert. Stage above Ground [mm] | 37 (26.5 ... 47.5) |
Accessories
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