XYZ-SLC17:30

Based on three SLC-1730 stages with a travel range of 21 mm each. The system is able to handle payloads of up to 1.5 N.

Download Spec Sheet
Download Spec Sheet Mechanical
Mechanical
Degrees of Freedom 3
Stages used SLC-1730
Travel [mm] 21 (X); 21 (Y); 21 (Z)
Payload [N] 1.5
  Closed-Loop
Closed-Loop
Closed-Loop Resolution MCS2 [nm] 1 (S)
  Breadboard Mount
Breadboard Mount
Dimensions [mm] 65 x 65 x 58 (L x W x H)
Center of vert. Stage above Ground [mm] 42 (31.5 ... 52.5)
  Direct Mount
Direct Mount
Dimensions [mm] 38 x 32 x 53 (L x W x H)
Center of vert. Stage above Ground [mm] 37 (26.5 ... 47.5)
  • Step-file_XYZ-SLC17:30
    Dec 11, 2019
  • Technical-Drawing_XYZ-SLC17:30
    Dec 11, 2019

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