CLL42 - Large Travel Piezo Stage
The CLL42 is equipped with SmarActs exchangeable drive units which guarantees easy access to the stage's core component, the piezo-drive. That makes servicing a very simple task. It is also available in a high vacuum version. The standard versions offer travels of 97, 177, 257, 377, 497 and 617 mm. Special lengths are of course available on request.
Specifications
Download Spec Sheet
| Download Spec Sheet | Mechanical |
|---|---|
| Mechanical | |
| Travel [mm] | 99 … 619 |
| Rail Length [mm] | 160 ... 680 |
| Blocking Force [N] | ≥ 5 |
| Max. Normal Force [N] | 30 |
| Dimensions [mm] | 60 x 16 (open-loop carriage) |
| Weight [g] | Length-dependent |
| Open-loop | |
| Open-loop | |
| Velocity [mm/s] | > 10 |
| Open-Loop Resolution MCS2 [nm] | < 1 |
| Open-Loop Resolution (H)CU [nm] | 50 |
| Closed-Loop | |
| Closed-Loop | |
| Sensor Resolution MCS2 [nm] | 1 (S), 4 (L) |
| Uni-Directional Repeatability MCS2 [nm] | ± 100 (S) |
| Options | |
| Options | |
| Material Options | Multiple carriages; Counterbores; Tapped holes (M4) |
| Mechanical Options | Multiple carriages; Counterbores; Tapped holes (M4) |
| Vacuum Options | HV (1E-6 mbar); UHV (1E-11 mbar) |
Accessories
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