XY-CLS52:52
Specifications
Download Spec Sheet
Download Spec Sheet | Mechanical |
---|---|
Mechanical | |
Degrees of Freedom | 2 |
Stages used | CLS-5252 |
Travel [mm] | 31 (X); 31 (Y); |
Payload [N] | 20 |
Closed-Loop | |
Closed-Loop | |
Sensor Resolution MCS2 [nm] | 1 (S) |
Breadboard Mount | |
Breadboard Mount | |
Dimensions [mm] | 90 x 90 x 34 (L x W x H) |
Height of Platform above Ground [mm] | 34 |
Direct Mount | |
Direct Mount | |
Dimensions [mm] | 52 x 52 x 28 (L x W x H) |
Height of Platform above Ground [mm] | 28 |
Accessories
Any questions?
Contact us!
Contact us!