XY-CLS52:52
Specifications
Download Spec Sheet
| Download Spec Sheet | Mechanical |
|---|---|
| Mechanical | |
| Degrees of Freedom | 2 |
| Stages used | CLS-5252 |
| Travel [mm] | 31 (X); 31 (Y); |
| Payload [N] | 20 |
| Closed-Loop | |
| Closed-Loop | |
| Sensor Resolution MCS2 [nm] | 1 (S) |
| Breadboard Mount | |
| Breadboard Mount | |
| Dimensions [mm] | 90 x 90 x 34 (L x W x H) |
| Height of Platform above Ground [mm] | 34 |
| Direct Mount | |
| Direct Mount | |
| Dimensions [mm] | 52 x 52 x 28 (L x W x H) |
| Height of Platform above Ground [mm] | 28 |
Accessories
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