XYZ-SLC23:30

Based on three SLC-1730-W stages with a U-shaped base for higher mechanical strength. The system allows payloads of up to 1.5 N to be positioned over a 21 mm travel range.

Step-file_XYZ-SLC23:30

Dec 11, 2019

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Technical-Drawing_XYZ-SLC23:30

Dec 11, 2019

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Specifications

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Download Spec Sheet	Mechanical
Mechanical
Degrees of Freedom	3
Stages used	SLC-1730-W
Travel [mm]	21 (X); 21 (Y); 21 (Z)
Payload [N]	1.5
	Closed-Loop
Closed-Loop
Sensor Resolution MCS2 [nm]	1 (S)
	Breadboard Mount
Breadboard Mount
Dimensions [mm]	65 x 65 x 58 (L x W x H)
Center of vert. Stage above Ground [mm]	42 (31.5 ... 52.5)
	Direct Mount
Direct Mount
Dimensions [mm]	38 x 32 x 53 (L x W x H)
Center of vert. Stage above Ground [mm]	37 (26.5 ... 47.5)