XYZR-XYZ CLS32:32 R SRP32:11
Specifications
Download Spec Sheet
| Download Spec Sheet | Mechanical |
|---|---|
| Mechanical | |
| Degrees of Freedom | 4 |
| Stages used | 3 x CLS-3232; 1 x SR-3211 |
| Travel [mm] | 21 (X); 21 (Y); 21 (Z) |
| Travel [°] | unlimited |
| Payload [N] | 3.3 |
| Closed-Loop | |
| Closed-Loop | |
| Sensor Resolution MCS2 [nm] | 1 (S) |
| Breadboard Mount | |
| Breadboard Mount | |
| Dimensions [mm] | 79 x 65 x 70 (L x W x H) |
| Center of vert. Stage above Ground [mm] | 43 (32.5 … 53.5) |
| Direct Mount | |
| Direct Mount | |
| Dimensions [mm] | 62.5 x 45.5 x 65 (L x W x H) |
| Center of vert. Stage above Ground [mm] | 38 (27.5 … 48.5) |
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