F01

Sensor head with focused beam with high alignment tolerance.

The F01 is a sensor head type with focused probe beam. This allows to measure displacements of small targets. Furthermore, the sensor heads provide high angular tolerances.

  • STEP-File: F01 sensor head
    Oct 30, 2019

Specifications

Download Spec Sheet
Download Spec Sheet Sensor Heads
Sensor Heads
Beam Geometry Focused
Focal Distance [mm] 10 (customizable)
Beam Waist Diameter [µm] 28 *
Working Distance [mm] 10 ± 0.5 *
Angular Working Range [°] ± 2 *
Environmental Compatibility Air, HV, UHV
Typical Targets Small Samples
  Mechanical
Mechanical
Dimensions [mm] 6 x 21 (Ø x L)

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