The TRIPOD 52-6DoF motion system has six degrees of freedom and uses SMARSLIDE high-precision piezo positioner.

The central component of the TRIPOD 52-6DoF is the TRIPOD 52-Core parallel kinematic tip-tilt stage. Its design with three radially arranged towers allows a roll and pitch motion of the top plate with a total travel of 20° for Rx, 19° for Rx and a linear translation in the Z direction of 6 mm. On top of the TRIPOD 52-Core a SR-3211 rotation stage allows an unlimited rotation around the Z axis. The TRIPOD 52-Core is fully compatible with the CLS-52 modular system and is placed on a XY platform consisting of two CLS-52 linear translation stages. The bottom plate allows a direct mounting to a standard optical breadboard with a 25mm grid. Values for rotational travel are given for a pivot point at the surface of the top plate.

Values for rotational travel are given for a pivot point at the surface of the top plate.

The overall dimensions of the complete system may be larger for different poses. For more information, see the CAD model in the download area.

The repeatability is measured about 20mm above the top plate of each system, over the full travel range and for a single degree of freedom at a time. Values may be better for shorter travel ranges.



  • Motion System Load Capacity
    Jan 06, 2023
  • Step-file_TRIPOD 52-6DoF
    Feb 15, 2023
  • Technical-Drawing_TRIPOD 52-6DoF
    Mar 02, 2022
  • Load Capacity Datasheet TriPod 52
    Mar 20, 2023


Download Spec Sheet
Download Spec Sheet Mechanical
Travel [mm] 31 (X); 31 (Y); 6 (Z)
Travel [°] 20 (Θx); 19 (Θy); 360 (Θz)
Max. Normal Force [N] 3
Max. Horizontal Force [N] 2.5
Dimensions [mm] 90 x 90
Height of Platform above Ground [mm] 79.5
Weight [g] 490
Sensor Types SC
Smallest Increment [nm] 1
Smallest Increment [µ°] 3
Uni-Directional Repeatability MCS2 [nm] +/- 50
Vacuum Options HV (1E-6 mbar); UHV (1E-11 mbar)


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