Measuring Lateral Vibrations Within All-Silicon Loudspeakers

When MEMS are packaged in a silicon enclosure it is impossible to evaluate their dynamic performance with conventional optical methods without opening them up. Beyond the interferometric measurement of out-of-plane vibrations, the PICOSCALE Vibrometer allows the imaging of in-plane vibrations of encapsulated devices with infrared confocal microscopy.

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PICOSCALE Vibrometer for the modal analysis of small samples.

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