Multi-Axis Positioning and Probing System for a Synchrotron Endstation
Understanding the micro- and nanostructure of materials requires many different analytical techniques. The most sophisticated techniques involve the use of focused x-ray beams generated by a synchrotron light source.
For better understanding of the crystal phases, orientations and strain/stress distribution together with their optical, electrical, mechanical and surface properties, SmarAct developed a unique sample positioning and probing system for the endstation of the “FOcus x-Ray for MicrO-Structure Analysis” (FORMOSA) beamline at the Taiwan Light Source. Combining four micro-manipulators with three degrees of freedom each, a sample stage and a full hexapod-like SMARPOD with six degrees of freedom in a compact setup that fits in a tightly confined space of a vacuum chamber.
The multi-axis positioning system allows to move the sample with nanometer resolution in the X-ray beam or orientate it towards the electron column of a SEM which is also connected to the system. The customized SMARPODoffers up to 110 mm by 80 mm travel in the horizontal and 70 mm in the vertical plane, allowing for tilt angles of up to 20° in order to align the sample platform to the different detectors mounted to the chamber.
© Ching-Shun Ku / TPS@NSRRC (Image Credit)