SMARFLEX nanopositioning scanner stages uses the advantages of piezo-driven mechanical flexures to realize highly precise positioning tasks up to several 100 μm.
The PLF5252-x.200 offers a scan range of over 200 μm in the X direction. At 90 g, it is very light and also quite compact at 52 x 52 x 15 mm.
| Download Spec Sheet | Mechanical |
|---|---|
| Mechanical | |
| Scantilt [µrad] | ± 5 |
| Stiffness [N/μm] | 0,1 |
| Scan Range [µm] | > 200 |
| Max. Normal Force [N] | 5.0 |
| Dimensions [mm] | 52 x 52 x 15 |
| Weight [g] | 90 |
| Material | |
| Material | |
| Base Material | Titanium(-TI) / Aluminum base (-Al) |
| Open-loop | |
| Open-loop | |
| Open-Loop Resolution MCS2 [nm] | MCS2: <1 |
| Closed-Loop | |
| Closed-Loop | |
| Sensor Resolution MCS2 [nm] | MCS2: <1 (S) |
| Options | |
| Options | |
| Vacuum Options | HV (10⁻⁶mbar) |
| Non-Magnetic Option | Yes (- NM) |
