PLF5252-x.200

SMARFLEX nanopositioning scanner stages uses the advantages of piezo-driven mechanical flexures to realize highly precise positioning tasks up to several 100 μm.

The PLF5252-x.200 offers a scan range of over 200 μm in the X direction. At 90 g, it is very light and also quite compact at 52 x 52 x 15 mm.

  • Step-File_PLF5252-x.200
    Jan 12, 2023
  • Technical-Drawing_PLF5252-x.200
    Jan 12, 2023

Specifications

Download Spec Sheet
Download Spec Sheet Mechanical
Mechanical
Scantilt [µrad] ± 5
Stiffness [N/μm] 0,1
Scan Range [µm] > 200
Max. Normal Force [N] 5.0
Dimensions [mm] 52 x 52 x 15
Weight [g] 90
  Material
Material
Base Material Titanium(-TI) / Aluminum base (-Al)
  Open-loop
Open-loop
Open-Loop Resolution MCS2 [nm] MCS2: <1
  Closed-Loop
Closed-Loop
Sensor Resolution MCS2 [nm] MCS2: <1 (S)
  Options
Options
Vacuum Options HV (10⁻⁶mbar)
Non-Magnetic Option Yes (- NM)

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