PLF3232-xy.60

SMARFLEX nanopositioning scanner stages uses the advantages of piezo-driven mechanical flexures to realize highly precise positioning tasks up to several 100 μm.

The PLF3232-xy.60 offers a scan range of 60 μm in the X and Y direction. At 45 g, it is very light and also quite compact at 32 x 32 x 20 mm. It combines two PLF3232-x.60 Scanners in one, with less built hight but same performance.

Due to the size and hole pattern, it fits ideal to other linear stages and positioners such as the CLS-3232 whereby long travel range and high precision is combined.

  • Step-File_PLF3232-xy.60
    Feb 15, 2023
  • Technical-Drawing_PLF3232-xy.60
    Mar 27, 2023

Specifications

Download Spec Sheet
Download Spec Sheet Mechanical
Mechanical
Scantilt [µrad] ± 3.5
Stiffness [N/μm] 0,5
Scan Range [µm] > 60
Max. Normal Force [N] 5
Dimensions [mm] 32 x 32 x 20
Weight [g] 45
  Material
Material
Base Material Titanium(-TI) / Aluminum base (-Al)
  Open-loop
Open-loop
Open-Loop Resolution MCS2 [nm] MCS2: <1
  Closed-Loop
Closed-Loop
Sensor Resolution MCS2 [nm] MCS2: <1 (S)
  Options
Options
Vacuum Options HV (10⁻⁶mbar)
Non-Magnetic Option Yes (- NM)

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