PLF3232-xy.60

SMARFLEX nanopositioning scanner stages uses the advantages of piezo-driven mechanical flexures to realize highly precise positioning tasks up to several 100 μm.

The PLF3232-xy.60 offers a scan range of 60 μm in the X and Y direction. At 45 g, it is very light and also quite compact at 32 x 32 x 20 mm. It combines two PLF3232-x.60 Scanners in one, with less built hight but same performance.

Due to the size and hole pattern, it fits ideal to other linear stages and positioners such as the CLS-3232 whereby long travel range and high precision is combined.

Step-File_PLF3232-xy.60

Feb 15, 2023

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Technical-Drawing_PLF3232-xy.60

Jul 17, 2024

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Specifications

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Download Spec Sheet	Mechanical
Mechanical
Scantilt [µrad]	± 3.5
Stiffness [N/μm]	0,5
Scan Range [µm]	> 60
Max. Normal Force [N]	5
Dimensions [mm]	32 x 32 x 20
Weight [g]	45
	Material
Material
Base Material	Titanium(-TI) / Aluminum base (-Al)
	Open-loop
Open-loop
Open-Loop Resolution MCS2 [nm]	MCS2: <1
	Closed-Loop
Closed-Loop
Sensor Resolution MCS2 [nm]	MCS2: <1 (S)
	Options
Options
Vacuum Options	HV (10⁻⁶mbar)
Non-Magnetic Option	Yes (- NM)