PLF3232-xy.60
SMARFLEX nanopositioning scanner stages uses the advantages of piezo-driven mechanical flexures to realize highly precise positioning tasks up to several 100 μm.
The PLF3232-xy.60 offers a scan range of 60 μm in the X and Y direction. At 45 g, it is very light and also quite compact at 32 x 32 x 20 mm. It combines two PLF3232-x.60 Scanners in one, with less built hight but same performance.
Due to the size and hole pattern, it fits ideal to other linear stages and positioners such as the CLS-3232 whereby long travel range and high precision is combined.
Specifications
Download Spec Sheet
| Download Spec Sheet | Mechanical |
|---|---|
| Mechanical | |
| Stiffness [N/μm] | 0,5 |
| Scan Range [µm] | > 60 |
| Max. Normal Force [N] | 5 |
| Dimensions [mm] | 32 x 32 x 20 |
| Weight [g] | 45 |
| Material | |
| Material | |
| Base Material | Titanium(-TI) / Aluminum base (-Al) |
| Open-loop | |
| Open-loop | |
| Open-Loop Resolution MCS2 [nm] | MCS2: <1 |
| Closed-Loop | |
| Closed-Loop | |
| Sensor Resolution MCS2 [nm] | MCS2: 1 (S) |
| Options | |
| Options | |
| Vacuum Options | HV (10⁻⁶mbar) |
| Non-Magnetic Option | Yes (- NM) |
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