XYZ-SLC24:45

Based on three SLC-2445 stages with a travel range of 29 mm each. The system is able to handle payloads of up to 1.5 N.

  • Step-file_XYZ-SLC24:45
    Dec 11, 2019
  • Technical-Drawing_XYZ-SLC24:45
    Dec 11, 2019

Specifications

Download Spec Sheet
Download Spec Sheet Mechanical
Mechanical
Degrees of Freedom 3
Stages used SLC-2445
Travel [mm] 29 (X); 29 (Y); 29 (Z)
Payload [N] 1.5
  Closed-Loop
Closed-Loop
Sensor Resolution MCS2 [nm] 1 (S)
  Breadboard Mount
Breadboard Mount
Dimensions [mm] 65 x 65 x 81 (L x W x H)
Center of vert. Stage above Ground [mm] 58.5 (44 ... 73)
  Direct Mount
Direct Mount
Dimensions [mm] 52 x 45 x 76 (L x W x H)
Center of vert. Stage above Ground [mm] 53.5 (49 ... 78)

Accessories

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