XYZ-XY SLC17:40 Z SLC17:30

Based on two SLC-1740 stages for X and Y with 26 mm travel range and one SLC-1730 with 21 mm travel range for Z. The system is able to handle payloads of up to 1.5 N.

Step-file_XYZ-XY SLC17:40 Z SLC17:30

Dec 11, 2019

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Specifications

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Download Spec Sheet	Mechanical
Mechanical
Degrees of Freedom	3
Stages used	SLC-1740 (X, Y); SLC-1730 (Z)
Travel [mm]	26 (X); 26 (Y); 21 (Z)
Payload [N]	1.5
	Closed-Loop
Closed-Loop
Sensor Resolution MCS2 [nm]	1 (S)
	Breadboard Mount
Breadboard Mount
Dimensions [mm]	65 x 65 x 62 (L x W x H)
Center of vert. Stage above Ground [mm]	47 (36.5 ... 57.5)
	Direct Mount
Direct Mount
Dimensions [mm]	42 x 40 x 57 (L x W x H)
Center of vert. Stage above Ground [mm]	42 (31.5 ... 52.5)