XYZ-XY SLC17:40 Z SLC17:30
Specifications
Download Spec Sheet
| Download Spec Sheet | Mechanical |
|---|---|
| Mechanical | |
| Degrees of Freedom | 3 |
| Stages used | SLC-1740 (X, Y); SLC-1730 (Z) |
| Travel [mm] | 26 (X); 26 (Y); 21 (Z) |
| Payload [N] | 1.5 |
| Closed-Loop | |
| Closed-Loop | |
| Sensor Resolution MCS2 [nm] | 1 (S) |
| Breadboard Mount | |
| Breadboard Mount | |
| Dimensions [mm] | 65 x 65 x 62 (L x W x H) |
| Center of vert. Stage above Ground [mm] | 47 (36.5 ... 57.5) |
| Direct Mount | |
| Direct Mount | |
| Dimensions [mm] | 42 x 40 x 57 (L x W x H) |
| Center of vert. Stage above Ground [mm] | 42 (31.5 ... 52.5) |
Downloads
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Step-file_XYZ-XY SLC17:40 Z SLC17:30
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