XYZR-XYZ SLC17:30 R SRP20:13
Specifications
Download Spec Sheet
| Download Spec Sheet | Mechanical |
|---|---|
| Mechanical | |
| Degrees of Freedom | 4 |
| Stages used | 3 x SLC-1730; 1 x SR-2013 |
| Travel [mm] | 21 (X); 21 (Y); 21 (Z) |
| Travel [°] | unlimited |
| Payload [N] | 1.3 |
| Closed-Loop | |
| Closed-Loop | |
| Sensor Resolution MCS2 [nm] | 1 (S) |
| Breadboard Mount | |
| Breadboard Mount | |
| Dimensions [mm] | 68 x 65 x 57 |
| Center of vert. Stage above Ground [mm] | 41.5 (31 ... 52) |
| Direct Mount | |
| Direct Mount | |
| Dimensions [mm] | 50 x 30 x 52 |
| Center of vert. Stage above Ground [mm] | 36.5 (26 ... 47) |
Downloads
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Step-file_XYZR-XYZ SLC17:30 Z SRP20:13
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