SMARPOD CLS-32 with Exchangeable Drive-Units

The SMARPOD CLS-32 is a mid-size system and is equipped with Exchangeable Drive Units, thus perfectly suited for high availability applications.

The SMARPOD CLS-32 key feature is the Exchangeable Drive Units (EDUs) guaranteeing an easy and fast exchange of the piezo drive without the necessity to fully disassemble the positioning system.  As an option, the base plate can be equipped with mounting posts for placing tools, sensors or other components close to the moving platform of the SMARPOD.

Values for rotational travel are given for a pivot point at the surface of the top plate.

The overall dimensions of the complete system may be larger for different poses. For more information, see the CAD model in the download area.

The repeatability is measured about 20 mm above the top plate of each system, over the full travel range and for a single degree of freedom at a time. Values may be better for shorter travel ranges.

  • Motion System Load Capacity
    Jan 06, 2023
  • Technical-Drawing_SMARPOD CLS-32
    Feb 15, 2023
  • Step-file_SMARPOD CLS-32
    Dec 22, 2021
  • Load Capacity Datasheet SmarPod CLS-32
    Nov 18, 2022


Download Spec Sheet
Download Spec Sheet Mechanical
Travel [mm] 20 (X); 20 (Y); 11 (Z)
Travel [°] 22 (Θx); 25 (Θy); 38 (Θz)
Max. Normal Force [N] 5
Max. Horizontal Force [N] 2.5
Dimensions [mm] Ø 123.7
Height of Platform above Ground [mm] 54.5
Weight [g] 520
Sensor Types SC
Smallest Increment [nm] 1
Smallest Increment [µ°] 3
Uni-Directional Repeatability MCS2 [nm] ± 50
Vacuum Options HV (1E-6 mbar); UHV (1E-11 mbar)
Non-Magnetic Option Yes (-NM)


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