The MR-30028 is a direct-drive rotation stage with a diameter of 300 mm and a large aperture of 110 mm for wafer handling and other demanding applications.
MR-30028 – Precision Wafer Rotation Stage
Specifications
Download Spec Sheet
| Download Spec Sheet | Mechanical |
|---|---|
| Mechanical | |
| Travel [°] | ∞ |
| Max. Normal Force [N] | 1000 |
| Dimensions [mm] | ⌀ 300 × 28 |
| Weight [g] | 5000 |
| Aperture [mm] | 110 |
| Material | |
| Material | |
| Base Material | Aluminum, black anodized |
| Open-loop | |
| Open-loop | |
| Angular Velocity [°/s] | 540 |
| Closed-Loop | |
| Closed-Loop | |
| Sensor Types | S |
| Sensor Resolution [µ°] | <1 |
| Angular Velocity [°/s] | 540 |
Accessories
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